Semiconductor device and semiconductor device manufacturing method

ABSTRACT

A first parallel pn layer in which first n-type regions and first p-type regions are disposed in a plan view layout of stripes in an element active portion. A second parallel pn layer has a plan view layout of stripes oriented in the same direction as that of the stripes of the first parallel pn layer in a breakdown voltage structure portion. Corner portions of the first parallel pn layer has a plan view shape where stepped regions formed by shortening the length of the first n-type and p-type regions in steps are disposed in a stepwise arrangement. The stepped regions continue with a second parallel pn layer via an intermediate region lower in average impurity concentration than the first parallel pn layer.

CROSS-REFERENCE TO RELATED APPLICATION

This application is based on, and claims priority to, Japanese PatentApplication No. 2015-076124, filed on Apr. 2, 2015, the contents ofwhich are entirely incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device and asemiconductor device manufacturing method.

2. Description of the Background Art

Heretofore, a semiconductor device (hereafter referred to as a superjunction semiconductor device) including a super junction (SJ) structurewith a drift layer as a parallel pn layer wherein n-type regions andp-type regions increased in impurity concentration are alternatelydisposed in a direction (a horizontal direction) parallel to a chipprincipal surface, is publicly known. In the super junctionsemiconductor device, current flows through the n-type regions of theparallel pn layer when in on-state, while a depletion layer also extendsfrom the pn junction between the n-type regions and p-type regions ofthe parallel pn layer when in off-state, and the n-type regions and thep-type regions are depleted, thus bearing a breakdown voltage. Also,with the super junction semiconductor device, as it is possible toincrease the impurity concentration of the drift layer, it is possibleto reduce on-resistance while maintaining a high breakdown voltage.

As this kind of super junction semiconductor device, a device includinga parallel pn layer wherein n-type regions and p-type regions aredisposed in a plan view layout of stripes extending with the same widthall over from an element active portion to a breakdown voltage structureportion, is proposed (for example, refer to JP-A-2008-294214 (Paragraph0020 and FIGS. 1 and 2)). In JP-A-2008-294214, the breakdown voltage ofthe breakdown voltage structure portion is set to be higher than thebreakdown voltage of the element active portion by setting the impurityconcentration of the parallel pn layer in the breakdown voltagestructure portion to be lower than the impurity concentration of theparallel pn layer in the element active portion. The element activeportion is a region through which current flows when in on-state. Anelement peripheral portion encompasses the element active portion. Thebreakdown voltage structure portion is disposed in the elementperipheral portion and is a region which relaxes the electric field on achip front surface side and holds the breakdown voltage.

Also, as another super junction semiconductor device, a device whereinthe repeated pitch of n-type regions and p-type regions of a parallel pnlayer is set to be narrower in a breakdown voltage structure portionthan in an element active portion, is proposed (for example, refer toJP-A-2002-280555 (Paragraph 0023 and FIG. 6), WO2013/008543 (Paragraph0032 and FIGS. 1 and 2), and JP-A-2013-089921 (Paragraph 0023 and FIGS.2, 3, and 5)). In JP-A-2002-280555, a parallel pn layer in which then-type regions and the p-type regions are disposed in a plan view layoutof stripes is provided in each of the element active portion andbreakdown voltage structure portion. In WO2013/008543, the parallel pnlayer in which the n-type regions and the p-type regions are disposed inthe plan view layout of stripes is provided in the element activeportion, and a parallel pn layer wherein the p-type regions are disposedin the n-type region in a plan view layout of matrix is provided in thebreakdown voltage structure portion.

In JP-A-2013-089921, the n-type regions and the p-type regions aredisposed in a plan view layout of stripes in each of the element activeportion and breakdown voltage structure portion, and in each of cornerportions (portion equivalent to the vertices of a rectangle) of theelement active portion having a substantially rectangular plan viewshape, the length of the n-type regions and p-type regions in adirection in which the stripes of the parallel pn layer extend isshortened in steps so as to follow the curvature of the corner portionof the element active portion. Also, as another super junctionsemiconductor device, a device wherein n-type regions and p-type regionsof a parallel pn layer are disposed in a plan view layout of stripes,and in the vicinity of the boundary between an element active portionand a breakdown voltage structure portion, the width of the p-typeregions of the parallel pn layer in the element active portion isgradually narrowed toward the outer side, is proposed (for example,refer to JP-A-2012-160752 (Paragraph 0051 and FIGS. 18 and 19)).

In JP-A-2002-280555, W02013/008543, JP-A-2013-089921, andJP-A-2012-160752, in the element active portion and breakdown voltagestructure portion, the impurity concentration of the parallel pn layerin the breakdown voltage structure portion is set to be lower than theimpurity concentration of the parallel pn layer in the element activeportion by changing the repeated pitch of the n-type regions and p-typeregions of the parallel pn layer and the width of the p-type regions ofthe parallel pn layer. Therefore, the breakdown voltage of the breakdownvoltage structure portion is higher than the breakdown voltage of theelement active portion, in the same way as in JP-A-2008-294214.

As a method of forming the parallel pn layer, a method whereby n-typeimpurities are ion implanted all over each time a non-doped layer isstacked by epitaxial growth, and after p-type impurities are selectivelyion implanted using a resist mask, the impurities are diffused by heattreatment, is proposed (for example, refer to JP-A-2011-192824(Paragraph 0025 and FIGS. 1 to 4)). In JP-A-2011-192824, with thesubsequent thermal diffusion step taken into account, the width ofopenings of the resist mask used to ion implant the p-type impurities isset to be on the order of ¼ of the width of the rest, in response towhich the amount of p-type impurities implanted is set to be on theorder of four times the amount of n-type impurities implanted, therebyequalizing the total impurity amount in the n-type regions to that inthe p-type regions of the parallel pn layer.

As another method of forming the parallel pn layer, a method wherebyafter each of n-type and p-type impurities is selectively ion implantedusing a different resist mask each time an n-type high resistance layeris stacked by epitaxial growth, the impurities are diffused by heattreatment, is proposed (for example, refer to JP-A-2000-040822(Paragraphs 0032 to 0035 and FIG. 4)). In JP-A-2000-040822, n-typeimpurity implantation regions forming the n-type regions of the parallelpn layer and p-type impurity implantation regions forming the p-typeregions are selectively formed so as to be opposed to each other in thehorizontal direction, and are thermally diffused. Therefore, it ispossible to increase the impurity concentration of both the n-typeregions and p-type regions, and it is possible to suppress the variationin impurity concentration in the vicinity of the pn junction betweenregions adjacent in the horizontal direction.

However, as a result of the inventors' keenly repeated researches, it isnewly revealed that the following problems arise when the parallel pnlayer is formed in the element active portion and breakdown voltagestructure portion by selectively ion implanting each of n-type andp-type impurities, as in JP-A-2000-040822. FIGS. 16A, 16B, 17A, and 17Bare plan views showing a plan view layout of a parallel pn layer of aheretofore known super junction semiconductor device. FIGS. 16A and 17Ashow a plan view layout of a parallel pn layer, when completed, in thevicinity of a corner portion of a first parallel pn layer 104. FIGS. 16Aand 17A show a ¼ portion of the heretofore known super junctionsemiconductor device. FIGS. 16B and 17B show a condition of the parallelpn layer in the process of being formed, respectively, in therectangular frames AA and BB of FIGS. 16A and 17A. The parallel pn layerin each of the rectangular frames AA and BB is a parallel pn layer in aboundary region 100 b between an element active portion 100 a and abreakdown voltage structure portion 100 c. An element peripheral portion100 d is configured of the boundary region 100 b and breakdown voltagestructure portion 100 c. In FIGS. 16A, 16B, 17A, and 17B, a horizontaldirection (hereafter referred to as a first direction) in which thestripes of the parallel pn layer extend is taken as y, and a horizontaldirection (hereafter referred to as a second direction) perpendicular tothe stripes is taken as x. Sign 101 is an n⁻-type semiconductor layerwhich is epitaxially grown to form the parallel pn layer.

As shown in FIGS. 16A and 17A, in the heretofore known super junctionsemiconductor device, the parallel pn layer (hereafter referred to asthe first parallel pn layer) 104 of the element active portion 100 a anda parallel pn layer (hereafter referred to as a second parallel pnlayer) 114 of the breakdown voltage structure portion 100 c both extend,and are in contact with each other, in the boundary region 100 b betweenthe element active portion 100 a and the breakdown voltage structureportion 100 c. As shown in FIGS. 16B and 17B, when forming the first andsecond parallel pn layers 104 and 114, n-type impurity implantationregions 121 forming first n-type regions 102 of the first parallel pnlayer 104 and p-type impurity implantation regions 122 forming firstp-type regions 103 are formed so as to extend in a first region 100 e onthe inner side (the element active portion 100 a side) of the boundaryregion 100 b. n-type impurity implantation regions 131 and 141 formingsecond n-type regions 112 and 115 of the second parallel pn layer 114and p-type impurity implantation regions 132 and 142 forming secondp-type regions 113 and 116 are formed so as to extend in a second region100 f on the outer side (the breakdown voltage structure portion 100 cside) of the boundary region 100 b. All the impurity implantationregions extend to the boundary between the first region 100 e and thesecond region 100 f. Sign 117 is a channel stopper region provided inthe terminal region of the breakdown voltage structure portion 100 c.

As shown in FIGS. 16A and 16B, when setting the first n-type regions 102and first p-type regions 103 of the first parallel pn layer 104 and thesecond n-type regions 112 and second p-type regions 113 of the secondparallel pn layer 114 to identical repeated pitches P11 and P12(P11=P12), the respective regions of the first and second parallel pnlayers 104 and 114 attain a condition in which the same conductivitytypes of regions of the two parallel pn layers are in contact with eachother. That is, the n-type impurity implantation regions 121 and 131forming the first and second n-type regions 102 and 112, as well as thep-type impurity implantation regions 122 and 132 forming the first andsecond p-type regions 103 and 113, are disposed in a plan view layout ofstripes continuing all over from the element active portion 100 a to thebreakdown voltage structure portion 100 c. Therefore, the charge balancebetween the first and second parallel pn layers 104 and 114 is neverlost in the boundary region 100 b, but as the first and second parallelpn layers 104 and 114 both have the same impurity concentration, nodifference in breakdown voltage occurs between the element activeportion 100 a and the breakdown voltage structure portion 100 c.Consequently, there is the problem that electric field is likely toconcentrate locally in the breakdown voltage structure portion 100 c,and that the breakdown voltage of the whole element is determined by thebreakdown voltage of the breakdown voltage structure portion 100 c.

Meanwhile, as shown in FIGS. 17A and 17B, when setting the repeatedpitch P12 of the second n-type regions 115 and second p-type regions 116to be narrower than the repeated pitch P11 of the first n-type regions102 and first p-type regions 103 (P11>P12), the n-type impurityconcentration or the p-type impurity concentration increases partiallyin the boundary region 100 b. For example, in JP-A-2013-089921, in thecorner portion of the first parallel pn layer 104, a portion 143, inwhich the length in the first direction y (hereafter referred to simplyas the length) of the n-type impurity implantation regions 121 andp-type impurity implantation regions 142 of the first parallel pn layer104 is shortened in steps, attains a condition in which an n-typeimpurity implantation region and a p-type impurity implantation region,which are different in the width in the second direction (hereafterreferred to simply as the width) , are adjacent to each other in thesecond direction x. For example, when the condition is attained in whichthe n-type impurity implantation region 121 and the p-type impurityimplantation region 142 are adjacent to each other in the seconddirection x, as shown in FIG. 17B, the n-type impurity concentration ofthis portion becomes higher than the p-type impurity concentration. Inthis way, there is the problem that it is difficult, in the cornerportion of the first parallel pn layer 104, to secure the charge balancein the boundary between the first parallel pn layer 104 and the secondparallel pn layer 114, and that the breakdown voltage of the boundaryregion 100 b drops partially. It is possible to suppress the partialdrop in breakdown voltage due to a relative reduction in the impurityconcentration of the first and second parallel pn layers 104 and 114,but the above problem leads to a drop in the breakdown voltage of thewhole element.

SUMMARY OF THE INVENTION

In order to solve the problems of the heretofore described heretoforeknown technologies, the invention has for its object to provide asemiconductor device, and a semiconductor device manufacturing method,which can reduce on-resistance and suppress a drop in breakdown voltage.

In order to solve the heretofore described problems and achieve theobject of the invention, a semiconductor device according to an aspectof the invention has the following features. A surface element structureis provided on the side of a first principal surface. A low resistancelayer is provided on the side of a second principal surface. A firstparallel pn layer is provided between the surface element structure andthe low resistance layer, and a second parallel pn layer is provided soas to encompass the first parallel pn layer. In the first parallel pnlayer, first first conductivity type regions and first secondconductivity type regions are alternately disposed in a directionparallel to the first principal surface. In the second parallel pnlayer, second first conductivity type regions and second secondconductivity type regions are alternately disposed, in the directionparallel to the first principal surface, at a pitch narrower than therepeated pitch of the first first conductivity type regions and firstsecond conductivity type regions. The first first conductivity typeregions and the first second conductivity type regions are disposed in aplan view layout of stripes. The plan view shape of the first parallelpn layer has a rectangle having corner portions, each of which is of astepwise arrangement wherein the length in a first direction of thefirst first conductivity type regions and first second conductivity typeregions, in which the first first and first second conductivity typeregions extend in stripes, is shortened in steps. The first firstconductivity type region or the first second conductivity type regionincludes a first portion, having a stepped shape, which is adjacent tothe second first conductivity type region or second second conductivitytype region so as to be parallel to the first direction, and a secondportion opposed to the second second conductivity type region or secondfirst conductivity type region in a second direction perpendicular tothe first direction. The width of the first portion in the seconddirection is narrower than the width of the second portion.

Also, the semiconductor device according to the invention is such thatin the aspect of the invention, the first portion is adjacent to aregion, of the second first conductivity type region and second secondconductivity type region configuring the second parallel pn layer, whichis different in conductivity type from the first portion.

Also, the semiconductor device according to the invention is such thatin the aspect of the invention, the first portion includes a firstrecess portion wherein a second portion side portion of the firstportion is narrower in width than the other portion of the firstportion.

Also, the semiconductor device according to the invention is such thatin the aspect of the invention, the first portion is in contact in thefirst direction with a region, of the second first conductivity typeregion and second second conductivity type region configuring the secondparallel pn layer, which is of the same conductivity type as that of thefirst portion. The region of the same conductivity type includes asecond recess portion wherein a first portion side portion of the regionof the same conductivity type is narrower in width than the otherportion of the region of the same conductivity type.

Also, the semiconductor device according to the invention is such thatin the aspect of the invention, the length of the first firstconductivity type regions and first second conductivity type regions isshortened in steps each time the first first conductivity type regionand the first second conductivity type region are each repeated by twoor more pitches in the corner portion of the first parallel pn layer.

Also, the semiconductor device according to the invention is such thatin the aspect of the invention, the second first conductivity typeregions and the second second conductivity type regions are disposed ina plan view layout of stripes orientated in the same direction as thatof the stripes of the first first conductivity type regions and secondfirst conductivity type regions.

Also, the semiconductor device according to the invention is such thatin the aspect of the invention, an intermediate region is providedbetween the opposing first parallel pn layer and second parallel pnlayer. The intermediate region has third first conductivity type regionsand third second conductivity type regions, which are provided so as tobe in contact with the first parallel pn layer, and fourth firstconductivity type regions and fourth second conductivity type regions,which are provided so as to be in contact with the second parallel pnlayer. The third first conductivity type regions are lower in averageimpurity concentration than the first first conductivity type regions.The third second conductivity type regions are lower in average impurityconcentration than the first second conductivity type regions. Thefourth first conductivity type regions are lower in average impurityconcentration than the second first conductivity type regions. Thefourth second conductivity type regions are lower in average impurityconcentration than the second second conductivity type regions. Thefirst portion is in contact with the second parallel pn layer in thesecond direction via the intermediate region.

Also, the semiconductor device according to the invention is such thatin the aspect of the invention, the surface element structure and thefirst parallel pn layer are disposed in an element active portionthrough which current flows when in on-state. The second parallel pnlayer is disposed in an element peripheral portion which encompasses theelement active portion.

Also, in order to solve the heretofore described problems and achievethe object of the invention, a semiconductor device manufacturing methodaccording to an aspect of the invention has the following features.Firstly, a formation step which repeatedly carries out first and secondsteps is carried out. In the first step, a first conductivity typesemiconductor layer is deposited. In the second step, first firstconductivity type impurity implantation regions, first secondconductivity type impurity implantation regions, second firstconductivity type impurity implantation regions, and second secondconductivity type impurity implantation regions are formed in a surfacelayer of the first conductivity type semiconductor layer. The firstfirst conductivity type and the first second conductivity type impurityimplantation regions are alternately disposed in a direction parallel toa surface of the first conductivity type semiconductor layer. The secondfirst conductivity type and the second second conductivity type impurityimplantation regions are disposed separated a predetermined widthoutward from the first first conductivity type impurity implantationregions and first second conductivity type impurity implantationregions. The second first conductivity type and the second secondconductivity type impurity implantation regions are alternatelydisposed, in a direction parallel to the surface of the firstconductivity type semiconductor layer, at a pitch narrower than therepeated pitch of the first first conductivity type impurityimplantation regions and first second conductivity type impurityimplantation regions. Furthermore, in the second step, the plan viewshape of a first formation region in which to form the first parallel pnlayer is formed into a rectangle having corner portions, each of whichis of a stepwise arrangement, by disposing the first first conductivitytype impurity implantation regions and first second conductivity typeimpurity implantation regions in a plan view layout of stripes so thatthe length in a first direction of the first first and first secondconductivity type impurity implantation regions, in which the firstfirst and first second conductivity type impurity implantation regionsextend in stripes, is shortened in A second formation region in which toform the second parallel pn layer is disposed so as to be opposed to thefirst first conductivity type impurity implantation regions or firstsecond conductivity type impurity implantation regions, in a seconddirection perpendicular to the first direction, in the portion formed inthe stepwise arrangement. The width of a first portion, of the firstfirst conductivity type impurity implantation region or first secondconductivity type impurity implantation region, which is opposed to thesecond formation region, is set to be narrower than the width of asecond portion other than the first portion. Next, a heat treatment stepis carried out. In the heat treatment step, the first first conductivitytype impurity implantation regions and the first second conductivitytype impurity implantation regions are diffused, thus forming a firstparallel pn layer in which the first first conductivity type regions andthe first second conductivity type regions are alternately disposed. Thesecond first conductivity type impurity implantation regions and thesecond second conductivity type impurity implantation regions arediffused, thus forming a second parallel pn layer in which the secondfirst conductivity type regions and the second second conductivity typeregions are alternately disposed.

Also, the semiconductor device manufacturing method according to theinvention is such that in the aspect of the invention, in the secondstep, the second first conductivity type impurity implantation regionand the second second conductivity type impurity implantation region aredisposed in the second formation region so that a region different inconductivity type is opposed to the first portion in the seconddirection.

Also, the semiconductor device manufacturing method according to theinvention is such that in the aspect of the invention, in the secondstep, a third recess portion wherein the width of a second portion sideportion of the first portion is set to be narrower than the width of theother portion of the first portion is formed.

Also, the semiconductor device manufacturing method according to theinvention is such that in the aspect of the invention, in the secondstep, the second first conductivity type impurity implantation regionand the second second conductivity type impurity implantation region aredisposed so that a region, of the second first conductivity typeimpurity implantation region and second second conductivity typeimpurity implantation region, which is of the same conductivity type asthat of the first portion, is opposed to the first portion in the firstdirection. A fourth recess portion wherein the width of a first portionside portion of the region of the same conductivity type is set to benarrower than the width of the other portion of the region of the sameconductivity type is formed.

Also, the semiconductor device manufacturing method according to theinvention is such that in the aspect of the invention, in the secondstep, the length in the first direction of the first first conductivitytype impurity implantation regions and first second conductivity typeimpurity implantation regions is shortened in steps each time the firstfirst conductivity type region and the first second conductivity typeregion are each repeated by two or more pitches, thereby forming theplan view shape of the corner portion of the first formation region intosteps.

Also, the semiconductor device manufacturing method according to theinvention is such that in the aspect of the invention, in the secondstep, the second first conductivity type impurity implantation regionsand the second second conductivity type impurity implantation regionsare disposed in a plan view layout of stripes orientated in the samedirection as that of the stripes of the first first conductivity typeimpurity implantation regions and first second conductivity typeimpurity implantation regions.

Also, the semiconductor device manufacturing method according to theinvention is such that in the aspect of the invention, in the secondstep, the second first conductivity type impurity implantation regionsand the second second conductivity type impurity implantation regionsare disposed in a position separated a predetermined width outward fromthe first first conductivity type impurity implantation regions andfirst second conductivity type impurity implantation regions. In theheat treatment step, an intermediate region, which has third firstconductivity type regions lower in average impurity concentration thanthe first first conductivity type regions, third second conductivitytype regions lower in average impurity concentration than the firstsecond conductivity type regions, fourth first conductivity type regionslower in average impurity concentration than the second firstconductivity type regions, and fourth second conductivity type regionslower in average impurity concentration than the second secondconductivity type regions, is formed between the first parallel pn layerand the second parallel pn layer by diffusing the first firstconductivity type impurity implantation regions, first secondconductivity type impurity implantation regions, second firstconductivity type impurity implantation regions, and second secondconductivity type impurity implantation regions.

Also, the semiconductor device manufacturing method according to theinvention is such that in the aspect of the invention, in the secondstep, the first portion is disposed in a position separated from thesecond formation region in the second direction. In the heat treatmentstep, the intermediate region is formed between the first portion andthe second formation region.

Also, the semiconductor device manufacturing method according to theinvention is such that in the aspect of the invention, the firstparallel pn layer and the second parallel pn layer are formed on a lowresistance layer lower in resistance than the first conductivity typesemiconductor layer. After the heat treatment step, a surface elementstructure is formed on the opposite side of the first parallel pn layerto the low resistance layer side.

Also, the semiconductor device manufacturing method according to theinvention is such that in the aspect of the invention, the firstparallel pn layer is formed in an element active portion through whichcurrent flows when in on-state, and the second parallel pn layer isformed in an element peripheral portion encompassing the element activeportion.

According to the aspects of the invention, it is possible to narrow thepitch of the first first conductivity type regions and first secondconductivity type regions for each repeated pitch of the portions formedin the stepwise arrangement (stepped regions) in the corner portion ofthe first parallel pn layer. Therefore, it is possible to lower theaverage impurity concentration of the first parallel pn layer for eachrepeated pitch of the stepped regions, and it is possible, in theportion low in the average impurity concentration, to suppress anadverse effect occurring mutually between the first and second parallelpn layers due to the difference in repeated pitch between the firstfirst conductivity type regions and the first second conductivity typeregions. Therefore, it is possible, in the corner portion of the firstparallel pn layer, to suppress a partial drop in the breakdown voltageof the boundary region between the element active portion and thebreakdown voltage structure portion. Consequently, even though thesecond parallel pn layer, the repeated pitch of the n-type regions andp-type regions of which is narrower than that of the first parallel pnlayer, is disposed in the breakdown voltage structure portion, thusmaking the breakdown voltage of the breakdown voltage structure portionhigher than the breakdown voltage of the element active portion, thedrop in breakdown voltage in the boundary region between the elementactive portion and the breakdown voltage structure portion does notoccur in the corner portion of the first parallel pn layer. Also, eventhough a lower on-resistance is achieved by increasing the averageimpurity concentration of the first parallel pn layer, it is possible tomaintain the difference in breakdown voltage between the elementperipheral portion and the element active portion.

According to the semiconductor device and semiconductor devicemanufacturing method of the invention, the advantageous effect that itis possible to reduce on-resistance and suppress a drop in breakdownvoltage is produced.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a plan view showing a plan view layout of a semiconductordevice according to Embodiment 1.

FIG. 2 is a plan view showing in detail the plan view layout in therectangular frame A of FIG. 1.

FIG. 3 is a plan view showing in enlarged dimension the plan view layoutin the rectangular frame B of FIG. 1.

FIG. 4 is a sectional view showing a sectional structure along thesection line C-C′ of FIG. 2.

FIG. 5 is a sectional view showing a condition of the semiconductordevice according to Embodiment 1 in the process of being manufactured.

FIG. 6 is a sectional view showing a condition of the semiconductordevice according to Embodiment 1 in the process of being manufactured.

FIG. 7 is a sectional view showing a condition of the semiconductordevice according to Embodiment 1 in the process of being manufactured.

FIG. 8 is a sectional view showing a condition of the semiconductordevice according to Embodiment 1 in the process of being manufactured.

FIG. 9 is a sectional view showing a condition of the semiconductordevice according to Embodiment 1 in the process of being manufactured.

FIG. 10 is a sectional view showing a condition of the semiconductordevice according to Embodiment 1 in the process of being manufactured.

FIGS. 11A and 11B are illustrations showing a condition of thesemiconductor device according to Embodiment 1 in the process of beingmanufactured.

FIG. 12 is a sectional view showing an example of an element activeportion of the semiconductor device according to Embodiment 1.

FIG. 13 is a sectional view showing another example of the elementactive portion of the semiconductor device according to Embodiment 1.

FIG. 14 is a plan view showing a condition of a semiconductor deviceaccording to Embodiment 2 in the process of being manufactured.

FIG. 15 is a plan view showing a condition of a semiconductor deviceaccording to Embodiment 3 in the process of being manufactured.

FIGS. 16A and 16B are plan views showing a plan view layout of aparallel pn layer of a heretofore known super junction semiconductordevice.

FIGS. 17A and 17B are plan views showing a plan view layout of theparallel pn layer of the heretofore known super junction semiconductordevice.

DETAILED DESCRIPTION OF THE INVENTION

Hereafter, a detailed description will be given, referring to theaccompanying drawings, of preferred embodiments of a semiconductordevice and semiconductor device manufacturing method according to theinvention. In the present specification and the accompanying drawings, nor p in layers and regions prefixed with n or p means respectively thatelectrons or holes are majority carriers. Also, + and − suffixed to n orp respectively mean a higher impurity concentration and lower impurityconcentration than in layers and regions affixed with neither + nor −.In the following description of the embodiments and the accompanyingdrawings, the same signs are given to like components, thus omitting aredundant description.

Embodiment 1

A description will be given of a structure of a semiconductor deviceaccording to Embodiment 1 with an n-channel type metal oxidesemiconductor field effect transistor (MOSFET: insulated gate fieldeffect transistor) having a super junction structure as an example. FIG.1 is a plan view showing a plan view layout of the semiconductor deviceaccording to Embodiment 1. FIG. 2 is a plan view showing in detail theplan view layout in the rectangular frame A of FIG. 1. FIG. 3 is a planview showing in enlarged dimension the plan view layout in therectangular frame B of FIG. 1. FIG. 4 is a sectional view showing asectional structure along the section line C-C′ of FIG. 2. FIG. 1 showsa ¼ portion of the semiconductor device according to Embodiment 1. Also,FIG. 1 shows a shape in a plane crossing a first and second parallel pnlayers 5 and 15, for example, in a plane at a depth of ½ of the firstparallel pn layer 5 of an element active portion 10 a.

Also, in FIG. 1, in order to clarify the difference between a repeatedpitch P1 of first n-type regions 3 and first p-type regions 4 and arepeated pitch P2 of second n-type regions 13 and second p-type regions14, the regions are illustrated so as to be smaller in number than inFIG. 4. FIG. 4 shows a sectional structure, passing through anintermediate region 6 between the first and second parallel pn layers 5and 15, which ranges from the first parallel pn layer 5 of the elementactive portion 10 a to the second parallel pn layer 15 of a breakdownvoltage structure portion 10 c. The element active portion 10 a is aregion through which current flows when in on-state. An elementperipheral portion 10 d, configured of a boundary region 10 b and thebreakdown voltage structure portion 10 c, encompasses the element activeportion 10 a. The breakdown voltage structure portion 10 c is a regionwhich relaxes a chip front surface side electric field and holds abreakdown voltage.

As shown in FIGS. 1 to 4, the semiconductor device according toEmbodiment 1 includes the element active portion 10 a and the elementperipheral portion 10 d encompassing the element active portion 10 a.The plan view shape of the element active portion 10 a formssubstantially a rectangle having corner portions (portions which are thevertices of the rectangle) each curved at a predetermined curvature. Asan element front surface structure, an unshown MOS gate (an insulatedgate formed of a metal oxide semiconductor) structure is provided on theside of a first principal surface (a chip front surface) of the elementactive portion 10 a . An n⁺-type drain layer 1 is provided on the sideof a second principal surface of the element active portion 10 a, and ann-type buffer layer 2 is provided in a position deeper from the secondprincipal surface (a chip rear surface) than the n⁺-type drain layer 1.A drain electrode 9 in contact with the n⁺-type drain layer 1 isprovided on the second principal surface of the element active portion10 a. The n-type buffer layer 2, the n⁺-type drain layer 1, and thedrain electrode 9 are provided all over from the element active portion10 a to the element peripheral portion 10 d.

In the element active portion 10 a, the first parallel pn layer 5 isprovided between the MOS gate structure and the n-type buffer layer 2.The first parallel pn layer 5 is such that the first n-type regions 3and the first p-type regions 4 are alternately joined in a direction (ahorizontal direction) parallel to the first principal surface. The firstn-type regions 3 and the first p-type regions 4 are in a plan viewlayout of stripes. In FIG. 2, the first n-type regions 3 are shownhatched, and the first p-type regions 4 are shown outlined. Hereafter, ahorizontal direction in which the stripes of the first parallel pn layer5 extend is taken as a first direction y, and a horizontal direction (adirection perpendicular to the first direction y) perpendicular to thestripes is taken as a second direction x. The first parallel pn layer 5is provided all over from the element active portion 10 a to theboundary region 10 b between the element active portion 10 a and thebreakdown voltage structure portion 10 c, and continues with the secondparallel pn layer 15, via the intermediate region 6, in the boundaryregion 10 b.

The first parallel pn layer 5, larger in surface area than the elementactive portion 10 a, has a substantially rectangular plan view shapesubstantially the same as the element active portion 10 a. The length(the length in the first direction y) of the first n-type regions 3 andfirst p-type regions 4, which is shortened in steps in the cornerportion of the first parallel pn layer 5, is set to a length such thatthe locus, which connects the end portions of the first n-type regions 3and the end portions of their adjacent first p-type regions 4, forms anapproximately substantially circular arc shape. Specifically, thefarther outward (the closer toward the breakdown structure portion 10 cside) in the second direction x the first n-type regions 3 and the firstp-type regions 4 are positioned, the shorter the length of the firstn-type regions 3 and first p-type regions 4 becomes each time the firstn-type region 3 and the first p-type region 4 are each repeated bypredetermined pitches. That is, the corner portion of the first parallelpn layer 5 has a plan view shape wherein a plurality of stepped regions5 a with a predetermined number of consecutive first n-type regions 3and first p-type regions 4 as one step are disposed in a stepwisearrangement.

Each stepped region 5 a continues with the second parallel pn layer 15via the intermediate region 6. That is, the second parallel pn layer 15extends, from the breakdown voltage structure portion 10 c to thestepped region 5 a side, in a stepwise arrangement corresponding to thestepped regions 5 a. Therefore, a portion 3 b on the side of an endportion in the first direction y (hereafter referred to simply as the“end portion”) of a region (in FIG. 2, the first n-type region 3(hereafter referred to as an outermost region 3 a of the stepped region5 a)), of the first n-type regions 3 and first p-type regions 4configuring the stepped region 5 a, which is positioned on the outermostside in the second direction x, is opposed to the second parallel pnlayer 15 in the second direction x via the intermediate region 6.Specifically, the end portion side portion 3 b of the outermost region 3a of the stepped region 5 a is opposed in the second direction x, viathe intermediate region 6, to a region (in FIG. 2, the second p-typeregion 14), of the second n-type regions 13 and second p-type regions 14of the second parallel pn layer 15, which is different in conductivitytype from the outermost region 3 a. In FIG. 2, the second n-type regions13 are shown hatched, and the second p-type regions 14 are shownoutlined.

Also, the outermost region 3 a of the stepped region 5 a forms a planview shape wherein the outermost region 3 a is narrowed to a width (thewidth in the second direction x) w3 by being uniformly withdrawninwardly in the second direction x by an outer side portion in thesecond direction x of the end portion side portion (hereafter referredto as a narrow width portion) 3 b. That is, the stepped region 5 a is atransition from one pitch to another of the first n-type regions 3 andfirst p-type regions 4. The width w3 of the narrow width portion 3 b ofthe outermost region 3 a of the stepped region 5 a is narrower than awidth w1 of the first n-type regions 3 of the first parallel pn layer 5(w3<w1) and wider than a width w2 of the second n-type regions 13 of thesecond parallel pn layer 15, to be described hereafter (w2<w3).Specifically, the width w3 of the narrow width portion 3 b of theoutermost region 3 a of the stepped region 5 a is substantially theaverage value of the width w1 of the first n-type regions 3 and thewidth w2 of the second n-type regions 13 (w3=(w1+w2)/2).

A pitch P3 of the first p-type region 4 and second p-type region 14opposed to each other in the second direction x with the outermostregion 3 a of the stepped region 5 a sandwiched in between issubstantially the average value of the repeated pitch P1 of the firstn-type regions 3 and first p-type regions 4 and the repeated pitch P2 ofthe second n-type regions 13 and second p-type regions 14(P3=(P1+P2)/2). The average impurity concentration of the outermostregion 3 a of the stepped region 5 a is substantially the average valueof the average impurity concentration of the first n-type regions 3 andthe average impurity concentration of the second n-type regions 13. FIG.2 shows a condition in which the stepped region 5 a is disposed eachtime the first n-type region 3 and the first p-type region 4 are eachrepeated by three pitches (a total of six pitches) , and each time thesecond n-type region 13 and the second p-type region 14 are eachrepeated by four pitches (a total of eight pitches).

The element peripheral portion 10 d is configured of the boundary region10 b and breakdown voltage structure portion 10 c. The elementperipheral portion 10 d is, for example, a region outside of the outerside end portion of a gate electrode of MOS gate structure disposed onthe outermost side, or when an n⁺-type source region is disposed outsideof the gate electrode, is a region outside of the outer side end portionof the n⁺-type source region. The breakdown voltage structure portion 10c encompasses the element active portion 10 a with the boundary region10 b sandwiched in between. The breakdown voltage structure portion 10 cis, for example, a region outside of the outer side end portion of ap-type base region 7 disposed on the outermost side.

In the breakdown voltage structure portion 10 c, the second parallel pnlayer 15 is provided on the n-type buffer layer 2. The second parallelpn layer 15 is such that the second n-type regions 13 and the secondp-type regions 14 are alternately joined in the horizontal direction.The second n-type regions 13 and the second p-type regions 14 are in aplan view layout of stripes. The direction of the stripes of the secondparallel pn layer 15 is the same as the direction of the stripes of thefirst parallel pn layer 5. The repeated pitch P2 of the second n-typeregions 13 and second p-type regions 14 is narrower than the repeatedpitch P1 of the first n-type regions 3 and first p-type regions 4.

The average impurity concentration of the second n-type regions 13 andthe average impurity concentration of the second p-type regions 14 arelower respectively than the average impurity concentration of the firstn-type regions 3 and the average impurity concentration of the firstp-type regions 4. As the average impurity concentration becomes lower,and a depletion layer becomes easier to extend in the second parallel pnlayer 15 in the direction of the outer periphery, by narrowing therepeated pitch P2 of the second n-type regions 13 and second p-typeregions 14, a rise in initial breakdown voltage is facilitated. Thesecond p-type regions 14 act in the same way as a guard ring untildepleted. As the electric field of the second n-type regions 13 isthereby relaxed, a rise in the breakdown voltage of the breakdownvoltage structure portion 10 c is facilitated.

The second parallel pn layer 15 is provided all over from the breakdownvoltage structure portion 10 c to the boundary region 10 b so as toencompass the first parallel pn layer 5 with the intermediate region 6sandwiched in between. Also, the second parallel pn layer 15 continueswith the first parallel pn layer 5 via the intermediate region 6, asheretofore described. The intermediate region 6 is a region forming asubstantially parallel pn layer wherein respective impurity implantationregions which form the first and second parallel pn layers 5 and 15,which are formed separately from one another by first and second ionimplantations, to be described hereafter, are diffused into a region (athird region to be described hereafter) into which the impuritiesbetween the impurity implantation regions are not ion implanted. Theintermediate region 6, configured of n-type regions lower in averageimpurity concentration than the first n-type regions 3 and p-typeregions lower in average impurity concentration than the first p-typeregions 4, is a region which is easier to deplete than the firstparallel pn layer 5 when in off-state.

Specifically, a third parallel pn layer 75 having third n-type regions73 and third p-type regions 74, which are alternately disposed at arepeated pitch substantially equal to the repeated pitch P1 of the firstn-type regions 3 and first p-type regions 4 and decrease in impurityconcentration toward the outer side, is disposed in the inner side(element active portion 10 a side) portion of the intermediate region 6.A fourth parallel pn layer 85 having fourth n-type regions 83 and fourthp-type regions 84, which are alternately disposed at a repeated pitchsubstantially equal to the repeated pitch P2 of the second n-typeregions 13 and second p-type regions 14 and decrease in impurityconcentration toward the inner side, is disposed in the outer sideportion of the intermediate region 6. The third n-type regions 73 lowerin average impurity concentration than the first n-type regions 3, thethird p-type regions 74 lower in average impurity concentration than thefirst p-type regions 4, the fourth n-type regions 83 lower in averageimpurity concentration than the second n-type regions 13, and the fourthp-type regions 84 lower in average impurity concentration than thesecond p-type regions 14 are disposed in the intermediate region 6.

Also, the p-type and n-type impurity doses of a region al of the firstparallel pn layer 5 and a region a3 of the second parallel pn layer 15,which have a width w4 the same as an intermediate region a2 of a sectionY sandwiched between the positions in each of which the center of thefirst p-type region 4 is opposed to the center of the second p-typeregion 14, satisfy Ca2<(Ca1+Ca3)/2 with respect to the intermediateregion a2 of the section Y. Ca1 to Ca3 are the impurity doses of theregions a1 to a3 respectively. The center of the first p-type region 4being opposed to the center of the second p-type region 14 is that thecenter in the second direction x of the first p-type region 4 and thecenter in the second direction x of the second p-type region 14 arepositioned on the same straight line in the first direction y.Therefore, the intermediate region 6 is a region which is more likely tobe depleted than the first parallel pn layer 5 when in off-state.Furthermore, in the positions in each of which the center of the firstp-type region 4 is opposed to the center of the second p-type region 14,the impurity concentration at a midpoint a2′ of the intermediate regiona2 of the section Y is lower than the impurity concentration at amidpoint a1′ of the region al of the first parallel pn layer 5 and theimpurity concentration at a midpoint a3′ of the region a3 of the secondparallel pn layer 15.

The third parallel pn layer 75 and fourth parallel pn layer 85 disposedin the intermediate region 6 are opposed to each other. A transitionregion 47, into which are diffused the impurities of the respectiveimpurity implantation regions of the first and second parallel pn layers5 and 15 having different repeated pitches, exists between the thirdparallel pn layer 75 and the fourth parallel pn layer 85. The thirdparallel pn layer 75 and the fourth parallel pn layer 85 may be incontact with each other so as to be superimposed one on the other bydiffusing the impurities between the respective impurity implantationregions forming the first and second parallel pn layers 5 and 15.

A portion of the second parallel pn layer 15 disposed in the breakdownvoltage structure portion 10 c may be provided in a thickness such asnot to reach the first principal surface from the n-type buffer layer 2.That is, the impurities, which are ion implanted into an epitaxialsubstrate by the first and second ion implantations, to be describedhereafter, for forming the second parallel pn layer 15, do not have tobe diffused to the first principal surface by the subsequent heattreatment. In this case, one portion of an uppermost n⁻-typesemiconductor layer epitaxially grown when forming the second parallelpn layer 15 remains between the second parallel pn layer 15 and thefirst principal surface, as an n⁻-type region, in the breakdown voltagestructure portion 10 c.

An n⁻-type region 12 is provided on the n-type buffer layer 2 outside ofthe second parallel pn layer 15. The n⁻-type region 12 is provided in athickness such as to reach the first principal surface from the n-typebuffer layer 2. The n⁻-type region 12, encompassing the second parallelpn layer 15, has the function of suppressing the extension of adepletion layer which spreads outwardly of the second parallel pn layer15 when in off-state. The average impurity concentration of the n⁻-typeregion 12 is lower than the average impurity concentration of the secondn-type regions 13. An n-channel stopper region 16 is provided on then-type buffer layer 2 in the terminal region of the breakdown voltagestructure portion 10 c.

The n-channel stopper region 16 is provided in a thickness such as toreach the first principal surface from the n-type buffer layer 2. Ap-channel stopper region may be provided in place of the n-channelstopper region 16. A p-type outermost peripheral region 17 is providedon the first principal surface side of the n-channel stopper region 16.A channel stopper electrode 18 is connected to the p-type outermostperipheral region 17 and is electrically insulated from a sourceelectrode 8 of MOS gate structure by an interlayer insulating film 19covering the first principal surface in the element peripheral portion10 d.

Although not particularly limited thereto, for example, when thesemiconductor device of Embodiment 1 is a horizontal type MOSFET and isof a breakdown voltage class of 600V, the dimensions and impurityconcentrations of the individual portions take the following values. Thethickness of a drift region (the thickness of the first parallel pnlayer 5) is 35 μm, and the width w1 of the first n-type regions 3 andfirst p-type regions 4 is 6.0 μm (the repeated pitch P1 is 12.0 μm). Thepeak impurity concentration in the width direction of the first n-typeregions 3 and first p-type regions 4 disposed on an n -typesemiconductor layer 21 c surface equivalent to a depth of ½ of the driftregion (an epitaxial layer 24 to be described hereafter (refer to FIG.9)) is 4.0×10¹⁵/cm³. The width w2 of the second n-type regions 13 andsecond p-type regions 14 is 4.0 μm (the repeated pitch P2 is 8.0 μm).The peak impurity concentration in the width direction of the secondn-type regions 13 and second p-type regions 14 disposed on the n⁻-typesemiconductor layer 21 c surface equivalent to a depth of ½ of the driftregion (the epitaxial layer 24 to be described hereafter) is2.0×10¹⁵/cm³. The width w3 of the narrow width portion 3 b of theoutermost region 3 a of the stepped region 5 a is 4 μm. The pitch P3 ofthe first p-type region 4 and second p-type region 14 opposed to eachother in the second direction x with the outermost region 3 a of thestepped region 5 a sandwiched in between is 10.0 μm. The stepped region5 a is disposed each time the first n-type region 3 and the first p-typeregion 4 are each repeated by three pitches (a total of six pitches).The width (the width in the first direction y of the intermediate region6) w4 in the first direction y between the first and second parallel pnlayers 5 and 15 is 2 μμm. It is preferable that the peak impurityconcentration in the width direction of the n⁻-type region disposed onthe n⁻-type semiconductor layer 21 c surface equivalent to a depth of ½of the drift region (the epitaxial layer 24 to be described hereafter)is 1.0×10¹⁵/cm³ or less.

In Embodiment 1, a configuration wherein the first parallel pn layer 5is provided between the MOS gate structure and the n-type buffer layer 2in the element active portion 10 a, and the second parallel pn layer 15is provided on the n-type buffer layer 2 in the breakdown voltagestructure portion 10 c, is shown, but a configuration may be such thatthe first parallel pn layer 5 is provided between the MOS gate structureand the n⁺-type drain layer 1, and that the second parallel pn layer 15is provided on the n⁺-type drain layer 1.

Next, a description will be given of a method of manufacturing thesemiconductor device according to Embodiment 1. FIGS. 5 to 10 aresectional views showing conditions of the semiconductor device accordingto Embodiment 1 in the process of being manufactured. FIGS. 11A and 11Bare illustrations showing conditions of the semiconductor deviceaccording to Embodiment 1 in the process of being manufactured. FIGS.11A and 11B show conditions of a corner portion of the first parallel pnlayer 5 in the process of being formed. FIG. 11A shows a plan viewlayout of an impurity implantation region after the first and second ionimplantations for forming the first parallel pn layer 5 and before heattreatment, and FIG. 11B shows a condition after the heat treatment.FIGS. 5 to 10 illustrate sectional conditions of the first parallel pnlayer 5 of the element active portion 10 a in the process of beingmanufactured, wherein a condition of the second parallel pn layer 15 ofthe breakdown voltage structure portion 10 c in the process of beingmanufactured is omitted from the illustration, but the second parallelpn layer 15 is formed at the same time as the first parallel pn layer 5by the same method as the first parallel pn layer 5. That is, in FIGS. 5to 10, a condition in which the repeated pitch P2 is narrowed is asectional condition of the second parallel pn layer 15 in the process ofbeing manufactured.

Firstly, as shown in FIG. 5, the n-type buffer layer 2 is formed, byepitaxial growth, on the front surface of an n⁺-type starting substrateforming the n⁺-type drain layer 1. Next, as shown in FIG. 6, a first n-type semiconductor layer 21 a is deposited (formed) to a predeterminedthickness, by epitaxial growth, on the n-type buffer layer 2. Next, asshown in FIG. 7, a resist mask 31, portions of which corresponding toregions in which to form the first p-type regions 4 of the firstparallel pn layer 5 and the second p-type regions 14 of the secondparallel pn layer 15 are opened, is formed on the n⁻-type semiconductorlayer 21 a. The width of the opening portions of the resist mask 31 isnarrower than the width w1 of the first p-type regions 4 in the elementactive portion 10 a, and is narrower than the width w2 of the secondp-type regions 14 in the breakdown voltage structure portion 10 c. Also,the width of the opening portions of the resist mask 31 is narrower inthe breakdown voltage structure portion 10 c than in the element activeportion 10 a. Next, a first ion implantation 32 of p-type impurities isperformed with the resist mask 31 as a mask. By performing the first ionimplantation 32, p-type impurity implantation regions 22 a areselectively formed in a surface layer of the n⁻-type semiconductor layer21 a, at the predetermined repeated pitch P1, in the element activeportion 10 a, and p-type impurity implantation regions 42 a areselectively formed in the surface layer of the n⁻-type semiconductorlayer 21 a, at the predetermined repeated pitch P2, in the breakdownvoltage structure portion 10 c (refer to FIG. 11A). The depth of thep-type impurity implantation regions 22 a and 42 a is shallower than,for example, a thickness t of the n⁻-type semiconductor layer 21 a.

Next, as shown in FIG. 8, after removing the resist mask 31, a resistmask 33, portions of which corresponding to regions in which to form thefirst n-type regions 3 of the first parallel pn layer 5 and the secondn-type regions 13 of the second parallel pn layer 15 are opened, isformed on the n -type semiconductor layer 21 a. The width of the openingportions of the resist mask 33 is narrower than the width w1 of thefirst n-type regions 3 in the element active portion 10 a, and isnarrower than the width w2 of the second n-type regions 13 in thebreakdown voltage structure portion 10 c. Also, the width of the openingportions of the resist mask 33 is narrower in the breakdown voltagestructure portion 10 c than in the element active portion 10 a. Next, asecond ion implantation 34 of n-type impurities is performed with theresist mask 33 as a mask. By performing the second ion implantation 34,n-type impurity implantation regions 23 a are selectively formed in thesurface layer of the n⁻-type semiconductor layer 21 a, at thepredetermined repeated pitch P1, in the element active portion 10 a, andn-type impurity implantation regions 43 a are selectively formed in thesurface layer of the n⁻-type semiconductor layer 21 a, at thepredetermined repeated pitch P2, in the breakdown voltage structureportion 10 c (refer to FIG. 11A). The depth of the n-type impurityimplantation regions 23 a and 43 a is shallower than, for example, thethickness t of the n⁻-type semiconductor layer 21 a. The step of formingthe n-type impurity implantation regions 23 a and 43 a may beinterchanged with the step of forming the p-type impurity implantationregions 22 a and 42 a.

In the first and second ion implantations 32 and 34 described above, theimpurity implantation regions 22 a, 23 a, 42 a and 43 a and steppedregions 25 a are disposed in the following way. As shown in FIG. 11A,the n-type impurity implantation regions 23 a and the p-type impurityimplantation regions 22 a are disposed separated a predetermineddistance d1 in the element active portion 10 a. The n-type impurityimplantation regions 43 a and the p-type impurity implantation regions42 a are disposed separated a predetermined distance d2 in the breakdownvoltage structure portion 10 c. That is, a width w1 of the n-typeimpurity implantation regions 23 a and p-type impurity implantationregions 22 a is set to be narrower than the width w1 of the first n-typeregions 3 and first p-type regions 4 of the first parallel pn layer 5. Awidth w12 of the n-type impurity implantation regions 43 a and p-typeimpurity implantation regions 42 a is set to be narrower than the widthw2 of the second n-type regions 13 and second p-type regions 14 of thesecond parallel pn layer 15. The impurity implantation regions 22 a, 23a, 42 a, and 43 a are disposed so as to extend to the boundary region 10b between the element active portion 10 a and the breakdown voltagestructure portion 10 c. Specifically, in the first direction y, then-type impurity implantation regions 23 a and p-type impurityimplantation regions 22 a of the element active portion 10 a aredisposed so as to extend in a first region 10 e on the inner side of theboundary region 10 b (the element active portion 10 a side). The n-typeimpurity implantation regions 43 a and p-type impurity implantationregions 42 a of the breakdown voltage structure portion 10 c aredisposed so as to extend in a second region 10 f on the outer side ofthe boundary region 10 b (the breakdown voltage structure portion 10 cside).

Also, the impurity implantation regions 22 a and 23 a of the elementactive portion 10 a and the impurity implantation regions 42 a and 43 aof the breakdown voltage structure portion 10 c may be disposedseparated in the first direction y by covering the vicinity of theboundary between the first region 10 e and the second region 10 f withthe resist masks 31 and 33 and thus forming a third region 10 g intowhich to ion implant no impurity. The third region 10 g is a portionwhich forms the intermediate region 6 between the first and secondparallel pn layers 5 and 15 by heat treatment, to be describedhereafter, and is formed to a width w4 substantially the same as that ofthe intermediate region 6. Furthermore, in the vicinity of the cornerportion of the region in which to form the first parallel pn layer 5,each stepped region 25 a is formed by shortening the length of then-type impurity implantation regions 23 a and p-type impurityimplantation regions 22 a of the element active portion 10 a each timethe n-type impurity implantation region 23 a and the p-type impurityimplantation region 22 a are each repeated by predetermined pitches. Then-type impurity implantation regions 43 a and p-type impurityimplantation regions 42 a of the breakdown voltage structure portion 10c are extended on the element active portion 10 a side in a stepwisearrangement corresponding to the stepped regions 25 a . Each steppedregion 25 a is brought into a condition in which the stepped region 25 ais opposed to the end portions of the n-type impurity implantationregions 43 a and p-type impurity implantation regions 42 a with thethird region 10 g sandwiched in between in the first direction y.

Also, each stepped region is brought into a condition in which an endportion side portion 26 b of a region (in FIG. 11A, the n-type impurityimplantation region 23 a (hereafter referred to as an outermost impurityimplantation region 26 a)), of the n-type impurity implantation regions23 a and p-type impurity implantation regions 22 a included in thestepped region 25 a, which is positioned on the outermost side in thesecond direction x, is opposed in the second direction x to a region (inFIG. 11A, the p-type impurity implantation region 42 a) different inconductivity type from the outermost impurity implantation region 26 a.Also, the outermost impurity implantation region 26 a of the steppedregion 25 a is formed into a plan view shape wherein the outermostimpurity implantation region 26 a is narrowed to a width w13 by beinguniformly withdrawn inwardly in the second direction x by an outer sideportion in the second direction x of the end portion side portion(narrow width portion) 26 b. The width w13 of the narrow width portion26 b of the outermost impurity implantation region 26 a of the steppedregion 25 a is set to be narrower than the width w11 of the n-typeimpurity implantation regions 23 a (w13<w11), and set to be wider thanthe width w12 of the n-type impurity implantation regions 43 a(w12<w13). Specifically, the width w13 of the narrow width portion 26 bof the outermost impurity implantation region 26 a of the stepped region25 a is set to substantially the average value of the width w11 of then-type impurity implantation regions 23 a and the width w12 of thep-type impurity implantation regions 42 a (w13=(w11+w12)/2).

Although not particularly limited thereto, for example, when thesemiconductor device of Embodiment 1 is a vertical type MOSFET and is ofa breakdown voltage class of 600V, the dimensions of the individualn-type impurity regions take the following values. The width w11 of then-type impurity implantation regions 23 a and p-type impurityimplantation regions 22 a of the element active portion 10 a is 3.0 μm(the repeated pitch P1 is 12.0 μm), and the impurity dose of the n-typeimpurity implantation regions 23 a and p-type impurity implantationregions 22 a is on the order of 0.2×10¹³/cm² or more and 2.0×10¹³/cm² orless. The width w12 of the n-type impurity implantation regions 43 a andp-type impurity implantation regions 42 a of the breakdown voltagestructure portion 10 c is 1.0 μtm (the repeated pitch P2 is 8.0 μm), andthe dose of the n-type impurity implantation regions 43 a and p-typeimpurity implantation regions 42 a is on the order of 0.2×10¹³/cm² ormore and 2.0×10¹³/cm² or less. The width w13 of the narrow width portion26 b of the outermost impurity implantation region 26 a is 2.0 μm (=(3.0μm+1.0 μm)/2). The pitch P3 of the p-type impurity implantation region22 a and p-type impurity implantation region 42 a which are opposed toeach other in the second direction x with the outermost impurityimplantation region 26 a of the stepped region 25 a sandwiched inbetween is 10.0 μm. The stepped region 25 wherein the n-type impurityimplantation region 43 a and the p-type impurity implantation region 42a are each repeated by four pitches (a total of eight pitches) each timethe n-type impurity implantation region 23 a and the p-type impurityimplantation region 22 a are each repeated by three pitches (a total ofsix pitches), is disposed in the vicinity of the corner portion of theregion in which to form the first parallel pn layer 5.

Next, as shown in FIG. 9, after removing the resist mask 33, a pluralityof n⁻-type semiconductor layers 21 b to 21 f are further deposited byepitaxial growth on the n⁻-type semiconductor layer 21 a, thus formingthe epitaxial layer 24 of a predetermined thickness which is formed ofthe plurality (for example, six) of n⁻-type semiconductor layers 21 a to21 f. At this time, each time the n⁻-type semiconductor layer 21 b to 21e is deposited, the first and second ion implantations 32 and 34 arecarried out in the same way as in the first n⁻-type semiconductor layer21 a, thus forming the p-type impurity plantation regions and n-typeimpurity implantation regions in each of the element active portion 10 aand breakdown voltage structure portion 10 c. The plan view layout ofthe p-type impurity implantation regions and n-type impurityimplantation regions formed in each of the element active portion 10 aand breakdown voltage structure portion 10 c is the same as the planview layout of the p-type impurity implantation regions and n-typeimpurity implantation regions formed in the first n⁻-type semiconductorlayer 21 a. FIG. 9 shows a condition in which p-type impurityimplantation regions 22 b to 22 e and n-type impurity implantationregions 23 b to 23 e are formed in the n⁻-type semiconductor layers 21 bto 21 e, respectively, in the element active portion 10 a. The first andsecond ion implantations 32 and 34 do not have to be carried out on theuppermost n⁻-type semiconductor layer 21 f, of the n -type semiconductorlayers 21 a to 21 f forming the epitaxial layer 24. The epitaxialsubstrate wherein the n-type buffer layer 2 and the epitaxial layer 24are stacked in order on the front surface of the n⁺-type startingsubstrate forming the n⁺-type drain layer 1, is formed by the steps sofar.

Next, as shown in FIGS. 10 and 11B, the respective n-type impurityimplantation regions and p-type impurity implantation regions in the n-type semiconductor layers 21 a to 21 e are diffused by heat treatment.FIG. 11B shows a sectional structure when the n -type semiconductorlayers 21 a to 21 f after the heat treatment are sectioned along thesection line C-C′ of FIG. 11A. The n-type impurity implantation regionsand the p-type impurity implantation regions, as they are formed in alinear shape extending in the first direction y, each expand in asubstantially cylindrical shape with an ion implantation place, whichextends in a linear shape in the first direction y, as a central axis.By so doing, in the element active portion 10 a, the first n-type region3 is formed by the n-type impurity implantation regions 23 a to 23 eopposed to each other in a depth direction z being connected so as to besuperimposed one on another, and the first p-type region 4 is formed bythe p-type impurity implantation regions 22 a to 22 e opposed to eachother in the depth direction z being connected so as to be superimposedone on another. Also, the first parallel pn layer 5 is formed by thefirst n-type regions 3 and first p-type regions 4 opposed to each otherin the second direction x being connected so as to be superimposed oneon another. In the breakdown voltage structure portion 10 c too, in thesame way, the second n-type region 13 is formed by the n-type impurityimplantation regions (not shown) opposed to each other in the depthdirection z being connected so as to be superimposed one on another, andthe second p-type region 14 is formed by the p-type impurityimplantation regions (not shown) opposed to each other in the depthdirection z being connected so as to be superimposed one on another.Also, the second parallel pn layer 15 is formed by the second n-typeregions 13 and second p-type regions 14 opposed to each other in thesecond direction x being connected so as to be superimposed one onanother. At this time, n-type impurities and p-type impurities arediffused into the third region 10 g of the boundary region 10 b,respectively, from the n-type impurity implantation regions and p-typeimpurity implantation regions of the element active portion 10 a andbreakdown voltage structure portion 10 c, thus forming the intermediateregion 6.

The n-channel stopper region 16 may be formed, for example, by the firstion implantation 32 at the same time as the formation of the first andsecond p-type regions 4 and 14, or by selectively ion implanting p-typeimpurities at a timing different from that of the first ion implantation32. The n⁻-type region 12 may be formed by covering the region in whichto form the n⁻-type region 12 with the resist masks 31 and 33 whenperforming the first and second ion implantations 32 and 33, orfurthermore, maybe formed by adding the step of selectively ionimplanting n-type impurities. Next, remaining steps such as the steps offorming the MOS gate structure, p-type outermost peripheral region 17,interlayer insulating film 19, source electrode 8, channel stopperelectrode 18, and drain electrode 9 are carried out in order by a commonmethod. Subsequently, the epitaxial substrate is diced (cut) into chips,thereby completing the super junction semiconductor device shown inFIGS. 1 to 4.

Next, a description will be given of an example of the element activeportion 10 a of the semiconductor device according to Embodiment 1. FIG.12 is a sectional view showing an example of the element active portionof the semiconductor device according to Embodiment 1. FIG. 13 is asectional view showing another example of the element active portion ofthe semiconductor device according to Embodiment 1. As shown in FIG. 12,a MOS gate structure of a common planar gate structure, which is formedof the p-type base regions 7, n⁺-type source regions 51, p⁺-type contactregions 52, gate insulating films 53, and gate electrodes 54, isprovided on the first principal surface side in the element activeportion 10 a. Also, as shown in FIG. 13, a MOS gate structure of acommon planar gate structure, which is formed of the p-type base regions7, n⁺-type source regions 61, p⁺-type contact regions 62, trenches 63,gate insulating films 64, and gate electrodes 65, may be provided on thefirst principal surface side in the element active portion 10 a. Each ofthe MOS gate structures only has to be such that the p-type base regions7 are disposed so as to be in contact in the depth direction with thefirst p-type regions 4 of the first parallel pn layer 5. Each dashedline in the first parallel pn layer 5 is the boundary between adjacentones of the plurality of n⁻-type semiconductor layers stacked byepitaxial growth when forming the first parallel pn layer 5.

As heretofore described, according to Embodiment 1, it is possible, inthe corner portion of the first parallel pn layer, to narrow the pitchof the first n-type regions and first p-type regions for each repeatedpitch of the stepped regions by shortening the length of the firstn-type regions and first p-type regions in steps and thus forming theplurality of stepped regions in a stepwise arrangement, and by partiallynarrowing the width of the outermost region of each stepped region.Therefore, it is possible to lower the impurity concentration of thefirst parallel pn layer for each repeated pitch of the stepped regions,and it is possible, in a portion lower in impurity concentration, tosuppress an adverse effect occurring mutually between the first andsecond parallel pn layers due to the difference in repeated pitchbetween the n-type regions and the p-type regions. Therefore, it ispossible, in the corner portion of the first parallel pn layer, tosuppress a partial drop in the breakdown voltage of the boundary regionbetween the element active portion and the breakdown voltage structureportion. Consequently, even though the second parallel pn layer lower inthe repeated pitch of the n-type regions and p-type regions than thefirst parallel pn layer is disposed in the breakdown voltage structureportion, thus setting the breakdown voltage of the breakdown voltagestructure portion to be higher than the breakdown voltage of the elementactive portion, the drop in breakdown voltage in the boundary regionbetween the element active portion and the breakdown voltage structureportion does not occur in the corner portion of the first parallel pnlayer. Therefore, it is possible to achieve a rise in the breakdownvoltage of the whole element by setting the breakdown voltage of theelement peripheral portion (the breakdown voltage structure portion andthe boundary region) to be higher than the breakdown voltage of theelement active portion. Also, even though the impurity concentration ofthe first parallel pn layer is set to be higher, thus achieving loweron-resistance, it is possible to maintain the difference in breakdownvoltage between the element peripheral portion and the element activeportion. Consequently, it is possible to reduce on-resistance andsuppress a drop in breakdown voltage.

Also, according to Embodiment 1, the third region into which to ionimplant no impurity is formed between the impurity implantation regionsforming the first parallel pn layer and the impurity implantationregions forming the second parallel pn layer, and by thermally diffusingboth impurity implantation regions into the third region, theintermediate region formed of a substantially parallel pn layer lower inimpurity concentration than the first parallel pn layer can be formedbetween the first and second parallel pn layers. As the impurityconcentration of the intermediate region is lower than the impurityconcentration of the first parallel pn layer, the intermediate region iseasier to deplete than the first parallel pn layer, and it is moredifficult for electric field to concentrate in the intermediate regionthan in the first parallel pn layer. Consequently, as it is possible toadjust the respective charge balances of the first and second parallelpn layers, the breakdown voltage of the element peripheral portion isset to be higher than the breakdown voltage of the element activeportion, thus facilitating a rise in the breakdown voltage of the wholeelement. Therefore, it is possible to improve reliability. Also, it ispossible to improve avalanche resistance and reverse recovery resistanceby setting the breakdown voltage of the element peripheral portion to behigher than the breakdown voltage of the element active portion.

Embodiment 2

Next, a description will be given of a method of manufacturing asemiconductor device according to Embodiment 2. FIG. 14 is a plan viewshowing a condition of the semiconductor device according to Embodiment2 in the process of being manufactured. In the method of manufacturingthe semiconductor device according to Embodiment 2, the plan view shapeof the impurity implantation regions (in FIG. 14, the n-type impurityimplantation regions 23 a) formed in the element active portion 10 a byion implantation is different from in the method of the semiconductordevice according to Embodiment 1. Specifically, for example, an outerside portion in the second direction x of the narrow width portion(hereafter referred to as a first narrow width portion) 26 b of theoutermost impurity implantation region 26 a of the stepped region 25 ahas a recess portion 71, thereby partially narrowing the width w13 ofthe first narrow width portion 26 b.

A portion (hereafter referred to as a second narrow width portion) 26 dof the first narrow width portion, which is set to be still narrower inwidth than the recess portion 71, is formed in the vicinity of theboundary with a portion (hereafter referred to as a wide width portion)26 c of the outermost impurity implantation region 26 a which is widerin width than the first narrow width portion 26 b. A width w21 of thesecond narrow width portion 26 d is set to be narrower than the widthw13 of the portion of the first narrow width portion 26 b other than thesecond narrow width portion 26 d, and wider than the width w12 of then-type impurity implantation regions 43 a (w12<w21<w13). Specifically,the width w21 of the second narrow width portion 26 d is set to, forexample, ½ of the width w11 of the outermost impurity implantationregion 26 a (the n-type impurity implantation region 23 a) (w21=w11/2).A length t1 of the second narrow width portion 26 d is the same as, forexample, the width (the width w4 of the intermediate region 6) of thethird region 10 g.

As heretofore described, according to Embodiment 2, it is possible toobtain the same advantageous effects as in Embodiment 1.

Embodiment 3

Next, a description will be given of a method of manufacturing asemiconductor device according to Embodiment 3. FIG. 15 is a plan viewshowing a condition of the semiconductor device according to Embodiment3 in the process of being manufactured. In the method of manufacturingthe semiconductor device according to Embodiment 3, the plan view shapeof the impurity implantation regions 42 a and 43 a (in FIG. 15, then-type impurity implantation regions 43 a) formed in the breakdownvoltage structure portion 10 c by ion implantation is different from inthe method of the semiconductor device according to Embodiment 1.Specifically, the width w12 of the n-type impurity implantation region43 a, opposed to the outermost impurity implantation region 26 a of thestepped region 25 a, which is the same in conductivity type as theoutermost impurity implantation region 26 a, is partially narrowed.

More specifically, the n-type impurity implantation regions 43 a and thep-type impurity implantation regions 42 a are disposed so that theoutermost impurity implantation region 26 a of the stepped region 25 ais opposed in the first direction y to the n-type impurity implantationregion 43 a which is the same in conductivity type as the outermostimpurity implantation region 26 a. The n-type impurity implantationregion 43 a opposed to the outermost impurity implantation region 26 ais disposed so as to be in contact in the first direction y with thefirst narrow width portion 26 b of the outermost impurity implantationregion 26 a. Also, as the n-type impurity implantation region 43 aopposed to the outermost impurity implantation region 26 a has a recessportion 72 on the inner side in the second direction x, the width w12 ofthe n-type impurity implantation region 43 a is partially narrowed.

A portion (hereafter referred to as a third narrow width portion) 43 bof the n-type impurity implantation region 43 a narrowed in width due tothe recess portion 72 is formed in the vicinity of the boundary of then-type impurity implantation region 43 a with the outermost impurityimplantation region 26 a. The third narrow width portion 43 b iscontinuous in contact in the first direction y with the first narrowwidth portion 26 b of the outermost impurity implantation region 26 a. Awidth w22 of the third narrow width portion 43 b is, for example, ½ ofthe width w12 of the n-type impurity implantation regions 43 a(w22=w12/2). A length t2 is the same as, for example, the width (thewidth w4 of the intermediate region 6) of the third region 10 g.

As heretofore described, according to Embodiment 3, it is possible toobtain the same advantageous effects as in Embodiment 1.

In the above, the invention, not being limited to each heretoforedescribed embodiment, can be variously modified without departing fromthe scope of the invention. For example, in each heretofore describedembodiment, a description is given, as an example, of a case in whichthe outermost region of the stepped region is an n-type region, but theoutermost region of the stepped region may be a p-type region. Also, thedimensions, impurity concentrations, and the like, described in eachembodiment are examples, and the invention is not limited to the valuesthereof. Also, in each embodiment, the first conductivity type is n-typeand the second conductivity type is p-type, but the invention holdsequally true even when the first conductivity type is p-type and thesecond conductivity type is n-type. Also, the invention, not beinglimited to a MOSFET, can also be applied to an insulated gate bipolartransistor (IGBT), a bipolar transistor, a free wheeling diode (FWD), aschottky diode, or the like.

As above, the semiconductor device and semiconductor devicemanufacturing method according to the invention are useful for a highpower semiconductor device including a breakdown voltage structureportion in an element peripheral portion encompassing an element activeportion, and in particular, for a high voltage semiconductor device,such as a MOSFET, an IGBT, a bipolar transistor, an FWD, a schottkydiode, or the like, with a drift layer as a parallel pn layer.

What is claimed is:
 1. A semiconductor device, comprising: a surfaceelement structure provided on a side of a first principal surface of thesemiconductor device; a low resistance layer provided on a side of asecond principal surface of the semiconductor device; a first parallelpn layer provided between the surface element structure and the lowresistance layer, the first parallel pn layer including first, firstconductivity type regions and first, second conductivity type regionsalternately disposed in a direction parallel to the first principalsurface, in a plan view the first, first conductivity type regions andthe first, second conductivity type regions being disposed to formstripes having longitudinal axes extending in a first direction, furtherin the plan view, the first parallel pn layer forms rectangle shapeshaving corner portions disposed in a stepwise arrangement so that alength, measured along the first direction, of the first, firstconductivity type regions and the first, second conductivity typeregions is shortened in steps; and a second parallel pn layer disposedto encompass the first parallel pn layer, the second parallel pn layerincluding second, first conductivity type regions and second, secondconductivity type regions alternately disposed in the direction parallelto the first principal surface so as to be at a pitch narrower than apitch of the first, first conductivity type regions and the first,second conductivity type regions, wherein the first, first conductivitytype regions or the first, second conductivity type regions includes afirst portion, having a stepped shape, which is adjacent to the second,first conductivity type regions or the second, second conductivity typeregions so as to be parallel to the first direction, and a secondportion opposed, in a second direction perpendicular to the firstdirection, to the second, second conductivity type regions or thesecond, first conductivity type regions, and a width of the firstportion in the second direction is narrower than a width of the secondportion in the second direction.
 2. The semiconductor device accordingto claim 1, wherein the first portion is adjacent to a region, of thesecond, first conductivity type regions and the second, secondconductivity type regions, which is different in the conductivity typethereof from the first portion.
 3. The semiconductor device according toclaim 1, wherein the first portion includes a first part and a secondpart, the second part including a recess portion so that the second partis narrower in width in the second direction than that of the firstpart.
 4. The semiconductor device according to claim 1, wherein in thefirst direction, the first portion is in contact with a connected regionof the second, first conductivity type regions or the second, secondconductivity type regions, the connected region being of the sameconductivity type as that of the first portion, and the connected regionincludes a recessed part including a recess portion so that the recessedpart is narrower in width along the second direction than that ofanother portion of the connected region.
 5. The semiconductor deviceaccording to claim 1, wherein the length, in the first direction, of thefirst, first conductivity type regions and the first, secondconductivity type regions is shortened, at the corner portions of thefirst parallel pn layer, in steps repeatedly at increments of two ormore of the first, first conductivity type regions and two or more ofthe first, second conductivity type regions.
 6. The semiconductor deviceaccording to claim 1, wherein in the plan view, the second, firstconductivity type regions and the second, second conductivity typeregions are disposed to form stripes having longitudinal axes orientatedin the first direction.
 7. The semiconductor device according to claim1, further comprising: between the opposing first parallel pn layer andthe second parallel pn layer, an intermediate region including: third,first conductivity type regions and third, second conductivity typeregions, disposed so as to be in contact with the first parallel pnlayer, the third, first conductivity type regions being lower in averageimpurity concentration than that of the first, first conductivity typeregions, the third, second conductivity type regions being lower inaverage impurity concentration than that of the first, secondconductivity type regions; and fourth, first conductivity type regionsand fourth, second conductivity type regions, disposed so as to be incontact with the second parallel pn layer, the fourth, firstconductivity type regions being lower in average impurity concentrationthan the second, first conductivity type regions, the fourth, secondconductivity type regions being lower in average impurity concentrationthan the second, second conductivity type regions, wherein the firstportion is in contact with the second parallel pn layer in the seconddirection via the intermediate region.
 8. The semiconductor deviceaccording to claim 1, further comprising: an element active portion inwhich the surface element structure and the first parallel pn layer aredisposed and through which current flows when in an on-state; and anelement peripheral portion in which the second parallel pn layer isdisposed and which encompasses the element active portion.
 9. Asemiconductor device manufacturing method, comprising: a formation stepwhich repeatedly carries out a first step including depositing a firstconductivity type semiconductor layer, and a second step includingforming, in a surface layer of the first conductivity type semiconductorlayer, first, first conductivity type impurity implantation regions andfirst, second conductivity type impurity implantation regions so thatthe first, first conductivity type and first, second conductivity typeimpurity implantation regions are alternately disposed in a directionparallel to a surface of the first conductivity type semiconductorlayer, and forming, in the surface layer of the first conductivity typesemiconductor layer, second, first conductivity type impurityimplantation regions and second, second conductivity type impurityimplantation regions so that the second, first conductivity type andsecond, second conductivity type impurity implantation regions arealternately disposed in the direction parallel to the surface of thefirst conductivity type semiconductor layer, at a pitch narrower than arepeated pitch of the first, first conductivity type impurityimplantation regions and the first, second conductivity type impurityimplantation regions; and a heat treatment step including diffusing thefirst, first conductivity type impurity implantation regions and thefirst, second conductivity type impurity implantation regions by heattreatment, and thus forming a first parallel pn layer in which first,first conductivity type regions and first, second conductivity typeregions are alternately disposed, and diffusing the second, firstconductivity type impurity implantation regions and the second, secondconductivity type impurity implantation regions by heat treatment, andthus forming a second parallel pn layer in which second, firstconductivity type regions and second, second conductivity type regionsare alternately disposed, wherein in the second step, in a plan view,shapes of a first formation region in which to form the first parallelpn layer is formed into rectangles having corner portions disposed in astepwise arrangement, by disposing the first, first conductivity typeimpurity implantation regions and the first, second conductivity typeimpurity implantation regions in stripes having longitudinal axesextending in a first direction, so that a length, along the firstdirection, of the first, first and first, second conductivity typeimpurity implantation regions is shortened in steps, a second formationregion in which to form the second parallel pn layer to be disposed tobe opposed to the first, first conductivity type impurity implantationregions or the first, second conductivity type impurity implantationregions, in a second direction perpendicular to the first direction, atthe corners portions formed in the stepwise arrangement, and a width ofa first portion, of the first, first conductivity type impurityimplantation regions or the first, second conductivity type impurityimplantation regions, which is opposed to the second formation region,is set to be narrower than a width of a second portion, of the first,first conductivity type impurity implantation regions or the first,second conductivity type impurity implantation regions, other than thefirst portion.
 10. The semiconductor device manufacturing methodaccording to claim 9, wherein in the second step, the second, firstconductivity type impurity implantation regions and the second, secondconductivity type impurity implantation regions are disposed in thesecond formation region so that a region, of the second, firstconductivity type impurity implantation regions and the second, secondconductivity type impurity implantation regions, different inconductivity type from the first portion is opposed to the first portionin the second direction.
 11. The semiconductor device manufacturingmethod according to claim 9, wherein in the second step, forming arecess portion, wherein the first portion includes a first part and asecond part, the second part including the recess portion, a width ofthe second part in the second direction is set narrower than a width ofthe first part in the second direction.
 12. The semiconductor devicemanufacturing method according to claim 9, wherein in the second step,the second, first conductivity type impurity implantation regions andthe second, second conductivity type impurity implantation regions aredisposed so that a same conductivity type region, of the second, firstconductivity type impurity implantation regions and the second, secondconductivity type impurity implantation regions, which is of the sameconductivity type as that of the first portion, is opposed to the firstportion in the first direction, and wherein a recess portion is formedin a first part of the same conductivity type region so that a width ofthe first part is set to be narrower than a width of another portion ofthe same conductivity type region.
 13. The semiconductor devicemanufacturing method according to claim 9, wherein in the second step,the length in the first direction, of the first, first conductivity typeimpurity implantation regions and the first, second conductivity typeimpurity implantation regions, is shortened in steps repeatedly atincrements of two or more of the first, first conductivity type regionand two or more of the first, second conductivity type region, therebyforming in the plan the corner portions of the first formation regioninto steps.
 14. The semiconductor device manufacturing method accordingto claim 9, wherein in the second step, in the plan view, the second,first conductivity type impurity implantation regions and the second,second conductivity type impurity implantation regions are disposed toform stripes having longitudinal axes orientated in the first direction.15. The semiconductor device manufacturing method according to claim 9,wherein in the second step, the second, first conductivity type impurityimplantation regions and the second, second conductivity type impurityimplantation regions are disposed in a position separated at apredetermined width outward from the first, first conductivity typeimpurity implantation regions and the first, second conductivity typeimpurity implantation regions, and in the heat treatment step, formingan intermediate region, including third, first conductivity type regionslower in average impurity concentration than that of the first, firstconductivity type regions, third, second conductivity type regions lowerin average impurity concentration than the first, second conductivitytype regions, fourth, first conductivity type regions lower in averageimpurity concentration than the second, first conductivity type regions,and fourth, second conductivity type regions lower in average impurityconcentration than the second, second conductivity type regions, in theheat treatment step, the third, first conductivity type regions, thethird, second conductivity type regions, the fourth, first conductivitytype regions and the fourth, second conductivity type regions are formedbetween the first parallel pn layer and the second parallel pn layer bydiffusing the first, first conductivity type impurity implantationregions, the first, second conductivity type impurity implantationregions, the second, first conductivity type impurity implantationregions, and the second, second conductivity type impurity implantationregions.
 16. The semiconductor device manufacturing method according toclaim 15, wherein in the second step, the first portion is disposed in aposition separated from the second formation region in the seconddirection, and in the heat treatment step, the intermediate region isformed between the first portion and the second formation region. 17.The semiconductor device manufacturing method according to claim 9,wherein the first parallel pn layer and the second parallel pn layer areformed on a low resistance layer lower in resistance than the firstconductivity type semiconductor layer, and after the heat treatmentstep, a surface element structure is formed on an opposite side of thefirst parallel pn layer to the low resistance layer side.
 18. Thesemiconductor device manufacturing method according to claim 9, whereinthe first parallel pn layer is formed in an element active portionthrough which current flows when in an on-state, and the second parallelpn layer is formed in an element peripheral portion encompassing theelement active portion.